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Silicon Surface Acoustic Wave Resonator

MEMS silicon resonators offer an on-chip alternative to quartz clocks. Our work involves the design and fabrication of piezoelectric surface acoustic wave resonators which are integrated with its interfacing circuitry.

Team

Anis Nurashikin Nordin - IIUM

Aliza Aini Md Ralib - IIUM

Ossama Mortada - XLIM

Aurelian Crunteanu - XLIM

Matthieu Chatras -XLIM

Jean Christophe Orlianges - XLIM

Pierre Blondy - XLIM

Contact

To learn more about our CMOS Surface Acoustic Wave Resonators contact alizaaini@iium.edu.my

Collaboration

Fabrication of these devices were done in collaboration with XLIM, Limoges, France

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Publications

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  1. "Ralib, Aliza Aini Md; Nordin, Anis Nurashikin; ",Comparative analysis of zinc oxide and aluminium doped ZnO for GHz CMOS MEMS surface acoustic wave resonator,"Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on",,,1-6,2013,IEEE

  2. "Ralib, Aliza Aini Md; Nordin, Anis Nurashikin; Hashim, Uda; ",Equivalent circuit modeling of two-port Al-doped Zinc Oxide CMOS SAW resonator using MATLAB™,"Circuits and Systems (ICCAS), 2013 IEEE International Conference on",,,140-145,2013,IEEE

  3. "Ralib, Aliza Aini Md; Nordin, Anis Nurashikin; Hashim, Uda; ",Finite element modeling of SAW resonator in CMOS technology for single and double interdigitated electrode (IDT) structure,"Micro and Nanoelectronics (RSM), 2013 IEEE Regional Symposium on",,,1-4,2013,IEEE

  4. "Ralib, Aliza Aini Md; Nordin, Anis Nurashikin; ","Silicon compatible acoustic wave resonators: design, fabrication and performance",IIUM Engineering Journal,15,2,,2014,

  5. "Md, Aliza Aini Binti Md Ralib; Nordin, Anis Nurashikin; ",Analysis of electromechanical coupling coefficient of surface acoustic wave resonator in ZnO piezoelectric thin film structure,"Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on",,,1-6,2014,IEEE

  6. "Ralib, Aliza Aini Md; Pandian, Mohanraj Soundara; Ferrer, Eloi Marigo; Song, Charlie TayWee; Shunmugam, Muniandy; Zainuddin, Ahmad Anwar Bin; Nordin, Anis Nurashikin; ",Piezoelectric characteristics of CMOS compatible AIN SAW resonators,2014 Asia-Pacific Microwave Conference,61-63,2014,IEEE

  7. "Ralib, Aliza Aini Md; Nordin, Anis Nurashikin; Malik, Noreha Abd; Othman, Raihan; ",Dependence of preferred c-axis orientation on RF magnetron sputtering power for AZO/Si acoustic wave devices,"Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015 Symposium on",,,1-6,2015,IEEE

  8. "Ralib, Aliza Aini Md; Nordin, Anis Nurashikin; Malik, Noreha A; Othman, Raihan; Alam, AHM Zahirul; Khan, Sheroz; Mortada, Ossama; Crunteanu, Aurelian; Chatras, Matthieu; Orlianges, Jean Christophe; ",A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application,Microsystem Technologies,,,1-12,2016,Springer Berlin Heidelberg

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